Microwave discharges: generation and diagnostics

Corona discharges: fundamentals and diagnostics

Introduction Corona discharges are discussed in this paper as one example of pulsed atmospheric discharges. Other configurations used are the dielectric barrier and the packed bed reactor. Here only the volume discharge will be discussed and not the surface discharge that also plays a role in these last two cases. The paper is divided in two parts. Fundamental processes that are important in co...

Comments on plasma diagnostics with microwave probes

Sources of ultraviolet light based on microwave discharges

Today microand nanoelectronics industry requires a source of extreme ultra-violet (EUV) radiation with a wavelength of 13.5 ± 1 % nm for high resolution projection lithography. The size of the emitting region must be less than 1 mm. One of the most promising sources of EUV light is considered to be a source that uses a pulsed CO2 laser radiation focused on a specially formed stream of droplets ...

O2 dissociation in Ar-O2 surface-wave microwave discharges

Oxygen dissociation in Ar-O2 microwave surface-wave discharges at p = 1 − 25 mbar is theoretically investigated, focusing on the dependence of the dissociation degree on pressure and on the mixture composition. It is shown that the dissociation degree is higher for high Ar content discharges, due to the modifications in the electron energy distribution function (EEDF) and to the effectiveness o...

Picosecond microwave pulse generation

Picosecond duration X-band microwave pulses have been generated using a laser-activated photoconductive switch. These pulses have been used to observe the microwave reflection from optically excited germanium. The reflection measurements indicate that the microwave pulse has a full width at half-maximum of 50 ps and is synchronized with picosecond precision to the laser pulse. A high-resolution...